Eckhardt Optics LLC sells a line of scatterometers based on our conoscopes. For a quick overview, view our brochure here. To turn a conoscope into a scatterometer, we add light sources for transmissive measurements (BTDF) or reflective measurements (BRDF) and appropriate analysis software.
The main advantage of a conoscope-based scatterometer is that you get real-time display of the scattering from the sample along with high resolution. Please see our background page on scatterometers for a comparison of the various types of scatterometers. We also have a page on how conoscopic scatterometers work.
Below is one of our conoscopic scatterometers.
Camera: Our standard camera is based on a Sony 20 megapixel camera (IMX183), which gives us 3648 pixels over the diameter of the image and 8 bits of SNR.
Light Source: Available light sources include UV, blue, green, yellow, red, near IR and white LED’s that can be configured for either reflective or transmissive measurements. For the highest possible resolution, we can use superluminescent LED’s (SLEDs), but these only come in blue, red and NIR.
Control: Our basic scatterometers offer simple and precise manual control of the sample position and angle of incidence. If you prefer, we can motorize these controls and drive them from the software. Let us know so we can configure a scatterometer to meet your measurement needs.
If you need a scatterometer or have questions and are interested in learning more, please contact us. We would be happy to discuss the details of your project.